Copyright @2021 Tung An Development LTD. All right reserved


Description

Tung An Development offers PVA products for critical cleaning processes in the semiconductor, rigid disk industries. We designs and manufactures a PVA products to meet the customers needs of each unique application.

We provide critical contamination control and precision cut products for these industries has enable to remove process contaminations from wafer and disk media. Tung an Development also would like to support customer for PVA products development for further needs.

Quality

Tung An Development manufactures all products was based on the standard of contamination control ,critical clean and physical performance. We also has set the standard in the use of test method to ensure the quality and cleanliness. we perform ICP-Master, chromatography, liquid particle count testing to verify and ensure that the cleanliness conform to our quality specification. All test result was approval by independent thirty-party certification organization(SGS).

Features

Easy to installation

High performance & cleanliness

Stable lifespan

Each lot Traceability

Sterilized with H2O2

Packaged in Class 100 clean room


Applications tools

Applied Materials

        Mirra Mesa (200mm)

        Reflexion (300mm)

 Ebra

        EPO Series(200mm)

        F*REX (300mm)

 Lam/OnTrack(200mm)

 Element
  Result
 Element
  Result
Na
Al
Cr
Fe
Ni
Cu
Mg
K
Ca
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
Mn
Zn
Ti
Ba
Pb
Sr
Co
Sn
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb

ION contamination


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